GP-16.2 high vacuum swing isolation valve provides stable and reliable isolation performance, and combines low particle count and low particle activation rate. The particularly smooth opening and closing action significantly improves particle control performance, making it very suitable for high vacuum processes that require strict cleanliness.
This series is an ideal choice for vacuum isolation in demanding processes, such as evaporation and sputtering applications. The GP-16.2 series can be optionally equipped with a three position pneumatic drive (single action with closing spring) or a standard pneumatic drive (single action with closing spring) to meet different system control requirements.
With its split structure design, the GP-16.2 series can be maintained without dismantling pipeline connections or process room connections, greatly reducing maintenance time. Its slim design allows valves to be directly installed in the process chamber, reducing the space occupation required for traditional process chamber valve pump connections.
The sturdy structure and diverse configuration options enable the GP-16.2 series to be easily integrated into various vacuum process systems. This series has been running for a long time in hundreds of mass production and online production systems worldwide, fully demonstrating its excellent performance and reliability under different process conditions.
GP-16.2 Main characteristics of high vacuum swing isolation valve
Feature
• Reliable isolation performance in harsh process environments
• Low impact opening and closing, low particle activation
• High process inertness and extremely low residual gas (RGA) content
Advantage
• High normal operating time
• Low operating costs
• Easy to maintain
客户留言
021-33656178
