The GP-65.3 high-precision pressure control swing valve sets a new standard for downstream pressure control and vacuum isolation, designed specifically for semiconductor production systems and flat panel display manufacturing systems. This series provides extremely high control accuracy and stability within a wide flow range, meeting the stringent requirements of vacuum pressure regulation in demanding processes.
The GP-65.3 series is equipped with high-performance motor drives with integrated position control, combined with an intelligent drive controller with 32-bit data processing capability, achieving extremely fast response, fine resolution, and high-precision valve plate position control. Its motion response can be completed in a very short time, ensuring precise downstream pressure control even under rapidly changing process conditions.
This valve can automatically adjust the speed curve and motion path of the valve plate according to process requirements, and adopts an optimized damping closing mechanism to effectively prevent particle release, impact, and vibration, achieving a smooth opening and closing process with almost imperceptible switching actions.
The valve plate adopts high-precision mechanical guidance to ensure contactless airflow control during reciprocating motion, and achieves uniform and stable sealing performance at all positions of the sealing stroke, thus balancing ultra-low particle performance and high reliability. "
Main features of GP-16.8 large high vacuum swing isolation valve

Feature
• Reliable isolation suitable for large vacuum flow rates
• Stable and reliable performance even under harsh working conditions
• Narrow and elongated body design, convenient for quick and easy maintenance operations

Advantage
• High normal operating time
• Low operating costs
• Flexible adjustment according to process requirements