GP-25.2 - High vacuum steel cylinder valve (three-way bidirectional type)
GP-25.2 high vacuum steel cylinder valve is suitable for high vacuum process environments that require reliable isolation under any conditions, especially in harsh gas scenarios containing corrosive substances and particles, such as secondary wafer fab processes. This series offers three structural versions: angle type (GP-25.0), series type (GP-25.1), and three-way two-way type (GP-25.2), all of which adopt maximum conductance design to ensure efficient operation of the vacuum system.
To achieve excellent durability and extended normal operating time, the GP-25.2 series is equipped with a sealing protection system, which combines the advantages of steel cylinder structure to balance high flow conductivity and longer sealing life.
Product Introduction
Product Parameters
GP-25.2 high vacuum steel cylinder valve is suitable for high vacuum process environments that require reliable isolation under any conditions, especially in harsh gas scenarios containing corrosive substances and particles, such as secondary wafer fab processes. This series offers three structural versions: angle type (GP-25.0), series type (GP-25.1), and three-way two-way type (GP-25.2), all of which adopt maximum conductance design to ensure efficient operation of the vacuum system.
To achieve excellent durability and extended normal operating time, the GP-25.2 series is equipped with a sealing protection system, which combines the advantages of steel cylinder structure to balance high flow conductivity and longer sealing life. The system operates through a tilt rotation tilt action mode:
When the valve is closed, the valve core will lift and remove the valve seal on the valve seat to avoid friction, seal wear, and particle generation.
When the valve is fully opened (rotated 90 °), the valve core will gently press the seal against the valve body, avoiding exposure of the seal to airflow containing abrasive particles.
In addition, in the event of a power outage, the valve body mechanism will be mechanically locked in the final open or closed position to ensure operational safety.
Main features of GP-25.2 high vacuum steel cylinder valve
Feature
• Suitable for harsh process environments, with reliable and mature design
• Tilt rotation tilt sealing protection mechanism effectively extends the sealing life
• Maximum flow conductivity design ensures excellent pumping and exhaust performance
Advantage
• Stable and reliable performance
• Low maintenance volume, easy to maintain
• Low cost of ownership
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size
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16 mm (⅝″),25 mm (1″),40 mm (1
½″)
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drive
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pneumatic
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double-acting
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Valve position indication
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LED
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Valve body material
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aluminium
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Connecting components
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Rotating through piece
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Can withstand pressure difference when opened
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≤ 1.2 bar
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pressure range
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1 × 10⁻⁸ mbar to 3 bar(Absolute pressure)
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Standard flange
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ISO-KF;ISO-KF*“Half angle type”;CF-R
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Number of switches before the first maintenance
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100 000
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temperature
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drive
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≤ 120 °C
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Position indicator
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≤ 80 °C
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seal
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Connecting components
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FKM
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Installation location
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any
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