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GP-61.3 - High vacuum butterfly control valve

The GP-61.3 high vacuum butterfly control valve can achieve excellent pressure control performance under various conditions. With a fast and precise execution controller (response time of 0.1 seconds), this series of valves is an ideal solution for fine pressure regulation in CVD (chemical vapor deposition) and ALD (atomic layer deposition) processes.
The valve plate can be used as a throttling element to adjust the flow characteristics by changing the opening degree. The integrated pressure controller can calculate the required valve plate position in real time, thereby quickly achieving the set pressure and maintaining stability.
Product Introduction
Product Parameters
The valve plate can be used as a throttling element to adjust the flow characteristics by changing the opening degree. The integrated pressure controller can calculate the required valve plate position in real time, thereby quickly achieving the set pressure and maintaining stability.
This series of products is designed for harsh process environments with downstream airflow containing particles. Even under conditions of high particle load and debris deposition caused by design, the GP-61.3 series can still operate stably and reliably.

Main features of GP-61.3 high vacuum butterfly control valve

Feature
• Excellent pressure control performance
• Extremely fast response speed (0.1 second level)
• Built in onboard software, capable of independent local operation
• Can still operate stably and reliably under harsh process conditions

Advantage
• Better controllability of the manufacturing process
• Long normal running time, stable performance without limitations
• Low operating costs
size DN 25 (1″)、DN 40 (1½″)、DN 50 (2″)、DN 63 (2½″)、DN 80 (3″)、DN 100 (4″)、DN 160 (6″)、DN 200 (8″)、DN 250 (10″)、DN 320 (12″)
drive Integrated controller with stepper motor for on-site control (foc)
Valve body material Aluminum or stainless steel
Standard flange ISO-KF,ISO-F
leakage rate aluminium < 1 × 10⁻⁹ mbar l s⁻¹
stainless steel < 1 × 10⁻⁹ mbar l s⁻¹
pressure range 1 × 10⁻⁴ mbar to 1.2 bar
Number of switches before the first maintenance* pressure control two million
temperature valve body ≤ 150 °C
controller max 50 °C(suggestion ≤ 35 °C)
material Valve body, valve plate - aluminum EN AW-6082 (3.2315)
Valve body, valve plate - stainless steel AISI 316L (1.4404 或 1.4435)
axis AISI 316L (1.4404 或 1.4435)
seal Forged parts FKM (Other as required)
Habitual component Rotating shaft, direct drive
Installation location Any (recommended to be installed on one side of the vacuum pump)
DN 25 DN 320
Maximum differential pressure On the valve plate 1000 mbar
75 mbar
conductance Molecular Flow 22 l s⁻¹
27 000 l s⁻¹
Minimum controllable conductance Molecular Flow 0.15 l s⁻¹
6 l s⁻¹
Typical closing or opening time * Location version only Aluminum, stainless steel 0.09 s
0.29 s
weight Aluminum valve 2.0 kg (4.40 lbs)
Stainless steel valve 2.5 kg (5.5 lbs)
10.4 kg (23 lbs)
12.3 kg (27.1 lbs)

Tel:

021-33656178

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