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size
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DN 25 (1″)、DN 40 (1½″)、DN
50 (2″)、DN 63 (2½″)、DN 80 (3″)、DN 100 (4″)、DN 160 (6″)、DN 200 (8″)、DN 250
(10″)、DN 320 (12″)
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drive
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Integrated controller with stepper motor for on-site control (foc)
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Valve body material
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Aluminum or stainless steel
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Standard flange
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ISO-KF,ISO-F
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leakage rate
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aluminium
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< 1 × 10⁻⁹ mbar l s⁻¹
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stainless steel
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< 1 × 10⁻⁹ mbar l s⁻¹
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pressure range
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1 × 10⁻⁴ mbar to 1.2 bar
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Number of switches before the first maintenance*
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pressure control
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two million
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temperature
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valve body
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≤ 150 °C
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controller
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max 50 °C(suggestion ≤ 35 °C)
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material
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Valve body, valve plate - aluminum
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EN AW-6082 (3.2315)
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Valve body, valve plate - stainless steel
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AISI 316L (1.4404 或 1.4435)
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axis
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AISI 316L (1.4404 或 1.4435)
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seal
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Forged parts
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FKM (Other as required)
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Habitual component
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Rotating shaft, direct drive
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Installation location
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Any (recommended to be installed on one side of the vacuum pump)
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DN 25
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DN 320
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Maximum differential pressure
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On the valve plate
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1000 mbar
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75 mbar
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conductance
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Molecular Flow
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22 l s⁻¹
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27 000 l s⁻¹
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Minimum controllable conductance
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Molecular Flow
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0.15 l s⁻¹
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6 l s⁻¹
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Typical closing or opening time * Location version only
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Aluminum, stainless steel
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0.09 s
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0.29 s
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weight
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Aluminum valve
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2.0 kg (4.40 lbs)
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Stainless steel valve
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2.5 kg (5.5 lbs)
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10.4 kg (23 lbs)
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12.3 kg (27.1 lbs)
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